Keithley 82-WIN Other
Manufacturer:
Model:
82-WIN
Date:
1997
Category:
Group:
Description:
Simultaneous C-V Measurement
User Manual
Manual type:
User Manual
Pages:
108
Size:
4.46 Mbytes (4676593 Bytes)
Language:
english
Revision:
B
Manual ID:
82WIN-900-01 Rev. B
Date:
01 October 1999
Quality:
Scanned document, all readable.
Upload date:
24 July 2020
MD5:
1476d79fac80f6a64c7da68465eb451d
Downloads:
167

Information

C-V Measurement ... 1 Introduction ... 1 Typical Measurement Sequence ... 3 First Time System Testing and Cable Correction ... .5 Leakage Test ... 5 Correcting for Excess Leakage Current ... 6 Correcting for Stray Capacitance ... -6 Cable Correction ... 7 Performing Cable Correction ... 8 Measurement Procedures ... 10 GPIB Configuration ... 10 Instrument Selection ... .l 1 Instrument Setup ... 11 Making C-V Measurements ... 13 Analyzing Data ... 15 Choose the Right Parameters ... .18 Optimal C-V Measurement Parameters ... 18 Start, Stop, and StepVoltages.. ... .18 Sweep Direction ... 19 Delay Time ... 20 Determining the Optimal Delay Tie ... 21 Measurement Results ... .23 Determining Delay Tie with Leaky Devices ... 24 Testing Slow Devices.. ... .25 Additional C-V Measurement Features ... 26 Squarewave ... 26 Staircase ... 26 Capacitance vs. Delay Tie ... 26 Time Options ... 26 Measurement Considerations ... 28 Potential Error Sources ... .28 Stray Capacitances ... 28 Leakage Resistances ... 31 High-frequency Effects ... .32 Avoiding Capacitance Errors.. ... .34 Cabling Considerations ... .34 Device Connections ... 35 Test Fixture Shielding ... .36 Correcting ResidualErrors ... .36 Offsets ... .36 Gainand Nonlinearity Errors ... .37 Voltage-dependent Offset.. ... .37 Curve Misalignment.. ... ... .37 Noise ... ,38 Interpreting C-V Curves ... .3 8 Maintaining Equilibrium.. ... 38 Analyzing Curves for Equilibrium.. ... .40 Initial Equilibrium ... 41 Dynamic RangeConsiderations.. ... .42 Series and Parallel Model Equivalent Circuits ... .42 Example.. ... .45 Device Considerations ... 46 Series Resistance ... 46 Device Structure ... .46 Device Integrity.. ... .47 Test Equipment Considerations ... .47 Light Leaks.. ... .47 Thermal Errors ... 47

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