Keithley 236 Ander
Fabrikant:
Model:
236
Datum:
1989
Categorie:
Groep:
Omschrijving:
Source Measure Units

Informatie

The 236, 237, and 238 Source-Measure Units (SMU) are fully programmable instruments, capable of sourcing and measuring voltage or current simulta- neously. These systems are really four instruments in one: Voltage Source, Current source, voltage mea- sure and current measure. QQZQ QZQQ QZZQ The 236 will source voltage from 100μV to 110V, and current from 100fA to 100mA. It can also measure voltage from 10μV to 110V and current from 10fA to 100mA. The 237 offers the same capabilities with a decade enhancement in Voltage Source and mea- sure (1100V). In this higher voltage range, current source and measure is 10mA maximum. The 238 offers a decade enhancement in Current source and measure (1A). In this higher current range, voltage source and measure is 15V maximum. The 236, 237, and 238 will measure very small cur- rents and voltages. With current sensitivity of 10fA, measurement capabilities are equal to those of an electrometer. Selectable integration and the filtering of multiple measurements enhances sensitivity for demanding applications. Both source voltages and source currents settle to specified accuracy in as little as 500μs. Programma- ble delay and fast, integrating measurement capa- bility can provide coordinated source-measure times of 1ms. Applications These instruments address a wide variety of appli- cations, including the characterization of semicon- ductor devices, and the measurement of leakage currents or resistivity. They are particularly useful as source and measuring instruments in automated test equipment (ATE). The 236, 237, and 238 provide simple, accurate mea- surements in semiconductor applications. Multiple units controlled with a personal computer make a powerful semiconductor parameter Analyzer. Non- standard tests are also performed efficiently be- cause of the unique versatility of these units. Two accessory semiconductor test fixtures maintain the signal integrity of the SMUs all the way to your device. The 8006 is a general purpose test fixture, and the 8007 is designed to accommodate either 24- or 48-pin devices. These test fixtures can be safety interlocked with the 236, 237, and 238 to prevent accidental shock. A Keithley Model 707A or 708A switching matrix and semiconductor switching cards may be used in conjunction with the 236, 237, and 238 for opti- mum performance in automated semiconductor measurement applications. Keithley SMUs are powerful tools for research and industrial test applications. The short set-up time and simplified programming are big advantages for tests that need to be up and running quickly. The overall versatility is ideal for constantly changing research use. The large dynamic range of source and measure capabilities permits accurate measurement of insu- lation resistance, leakage current, and dissipation factors. The high sensitivity of these units make them ideal for characterizing the electrical proper- ties of many materials.

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Application Manual

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Informatie

SECTION 1 — Getting Started 1.1 INTRODUCTION ... 1-1 Source-Measure Concepts 1.2 OPERATION OVERVIEW ... 1-3 1.3 BASIC CIRCUIT CONFIGURATIONS ... 1-7 1.4 GUARD AND REMOTE SENSING ... 1-9 1.5 OPERATING BOUNDARIES ... 1-9 Front and Rear Panel Familiarization 1.6 FRONT PANEL FAMILIARIZATION ... 1-13 1.7 REAR PANEL FAMILIARIZATION ... 1-16 Basic Source-Measure Techniques 1.8 POWER UP ... 1-19 1.9 CONNECTIONS ... I'20 1.9.1 Source Measure Unit Connections to Test Fixture ... 1-20 1.9.2 Test Connections ... 1-21 1.10 SOURCE-MEASURE EXAMPLES ... 1-22 1.10.1 Dc Operation Example — Resistor Test ... 1-22 1.10.2 Sweep Operation Example — Zener Diode Test ... 1-24 SECTION 2 — Operation 2.1 INTRODUCTION ... 2-1 2.2 POWER UP PROCEDURE ... 2-3 2.2.1 Line Voltage Setting ... 2-3 2.2.2 Fuse Replacement ... 2-3 2.2.3 Power Cord ... 2-4 2.2.4 Power up Display Messages and Self Test ... 2-4 2.2.5 Power up Configuration ... 2-4 2.2.6 Line Frequency Setting ... 2-4 2.2.7 Warm Up Period ... 2-5 2.2.8 Fan Filter Cleaning ... 2-5 Connections 2.3 BASIC TEST CONNECTIONS ... 2-7 2.3.1 Interlock ... 2-7 2.3.2 Guarding, Shielding and Sensing ... 2-8 2.3.3 Model 8006 Component Test Fixture ... 2-10 2.3.4 Custom Test Fixture ... 2-12 2.4 MULTI UNIT CONNECTIONS ... 2-16 2.4.1 Interlock Connections ... 2-16 2.4.2 Trigger Connections ... 2-17 2.4.3 Test Connections ... 2-19 2.5 IEEE-488 BUS CONNECTIONS ... 2-20 2.5.1 Bus Connector ... 2"20 2.5.2 Multiple Connections ... 2-20 2.5.3 Recommended Cables ... 2-20 2.5.4 Connection Procedure ... 2-20 2.5.5 Bus Limitations ... 2-20 2.6 TYPICAL SWITCHING CONFIGURATIONS ... 2-21 2.6.1 Model 7058 Low Current Switching Card ... 2-21 2.6.2 Model 7152 Low Current Matrix Card ... 2-24 2.6.3 Model 7072 Semiconductor Matrix Card ... 2-28 2.6.4 General Purpose Matrix Cards ... 2-30 2.7 HIGH VOLTAGE SWITCHING CONFIGURATIONS ... 2-31 2.7.1 Model 7154 2-pole High Voltage Scanner Card ... 2-31 2.7.2 Model 7054 1-pole High Voltage Scanner Card ... 2-32 2.7.3 Model 7070-PCA Prototype Circuit Assembly ... 2-32 2.7.4 Model 7072-HV High Voltage Semiconductor Matrix Card ... 2-32 Operating Fundamentals (Dc Operation) 2.8 DISPLAY MESSAGES ... 2-33 2.9 DATA ENTRY ... 2-33 2.9.1 Entering Source and Compliance Values ... 2-35 2.9.2 Entering Other Operating Parameters ... 2-36 2.10 MENU ... 2-36 2.10.1 Dc Delay ... 2-37 2.10.2 Default Delay ... 2-37 2.10.3 Sense ... 2-39 2.10.4 Ac Line Frequency ... 2-40 2.10.5 IEEE-488 Bus Address ... 2-41 2.10.6 Display Test ... 2-41 2.10.7 Memory Test ... 2-41 2.10.8 Factory Initialization ... 2-42 2.11 SELECT SOURCE AND FUNCTION ... 2-44 2.12 SET COMPLIANCE AND MEASUREMENT RANGE ... 2-46 2.13 AUTORANGE ... 2-48 2.14 OPERATE ... 2-49 2.15 /TIME ... 2-50 2.16 FILTER ... 2-52 2.17 SUPPRESS ... 2-53 Sweep Operation 2.18 BASIC SWEEP WAVEFORMS ... 2-55 2.19 CREATE SWEEP ... 2-61 2.19.1 Parameter Definitions ... 2-61 2.19.2 General Procedure ... 2-62 2.19.3 IEEE-488 Bus Operation ... 2-67 2.19.4 Fixed Level Sweep ... 2-67 2.19.5 Linear Staircase Sweep ... 2-68 2.19.6 Logarithmic Staircase Sweep ... 2-70 2.19.7 Pulse Sweep ... 2-71 2.19.8 Linear Staircase Pulse Sweep ... 2-72 2.19.9 Log Staircase Pulse Sweep ... 2-73 2.20 APPEND SWEEP ... 2-75 2.20.1 Sweep Append Procedure ... 2-76 2.20.2 IEEE-488 Bus Operation ... 2-77 2.21 MODIFY SWEEP ... 2-78 2.21.1 Sweep Modification Procedure ... 2-80 2.21.2 IEEE-488 Operation ... 2-80 2.22 CONFIGURE TRIGGERS ... 2-81 2.22.1 Input Triggers ... 2-83 2.22.2 Input Trigger Origin ... 2.22.3 Output Triggers ... 2-88 2.22.4 Sweep End Output Trigger ... 2-88 2.22.5 Enable/Disable Triggers ... 2-88 2.22.6 Trigger Configuration Procedure ... 2-90 2.22.7 IEEE-488 Operation ... 2-91 2.23 PERFORMING A SWEEP ... 2-91 2.24 RECALLING SWEEP DATA ... 2-92 2.25 MULTI UNIT OPERATION ... 2-94 Source-Measure Considerations 2.26 CURRENT CLAMP ... 2-99 2.27 SINK OPERATION ... 2-101 2.28 MAKING STABLE MEASUREMENTS ... 2-105 2.29 MEASURE ONLY ... 2-110 2.30 GUARDING ... 2-112 2.31 ELECTROSTATIC INTERFERENCE ... 2-113 2.32 THERMAL EMFS ... 2'113 2.33 ELECTROMAGNETIC INTERFERENCE (EMI) ... 2-114 2.34 GROUND LOOPS ... 2‘114 SECTION 3 — IEEE-488 Reference 3.1 INTRODUCTION ... 3-1 3.2 PRIMARY ADDRESS PROGRAMMING ... 3-1 3.3 CONTROLLER PROGRAMMING ... 3-2 3.4 FRONT PANEL ASPECTS OF IEEE-488 OPERATION ... 3-2 3.4.1 Front Panel Messages ... 3-2 3.4.2 IEEE-488 Status Indicators ... 3-5 3.4.3 LOCAL Key ... 3-5 3.5 GENERAL BUS COMMANDS ... 3-5 3.5.1 REN (Remote Enable) ... 3-6 3.5.2 IFC (Interface Clear) ... 3-6 3.5.3 LLO (Local Lockout) ... 3-6 3.5.4 GTL (Go To Local) and Local ... 3-6 3.5.5 DCL (Device Clear) ... 3-7 3.5.6 SDC (Selective Device Clear) ... 3-7 3.5.7 GET (Group Execute Trigger) ... 3-7 3.5.8 SPE, SPD (Serial Polling) ... 3-7 Device-dependent Commands 3.6 DEVICE-DEPENDENT COMMAND PROGRAMMING ... 3-11 3.6.1 A — Modify Sweep List ... 3-16 3.6.2 B —Bias ... 349 3.6.3 C — Calibration ... 3-22 3.6.4 D —Display ... 3'25 3.6.5 F — Source and Function ... 3-27 3.6.6 G — Output Data Format ... 3-28 3.6.7 H — IEEE Immediate Trigger ... 3-35 3.6.8 J — Self-tests ... 3-36 3.6.9 K —EOI and Bus Hold-Off ... 3-37 3.6.10 L — Compliance ... 3"3 3.6.11 M — SRQ Mask and Serial Poll Byte Format ... 3'40 3.6.12 N — Operate ... 3'44 3.6.13 O — Output Sense ... 3'4 3.6.14 P — Filter ... 3-46 3.6.15 Q — Create/Append Sweep List ... 3-47 3.6.16 R — Trigger Control ... 3-57 3.6.17 S — Integration Time ... 3-58 3.6.18 T — Trigger Configuration ... 3-59 3.6.19 U — Status ... 3-62 3.6.20 V — 1100V Range Control ... 3-75 3.6.21 W — Default Delay ... 3-77 3.6.22 X — Execute ... 3-79 3.6.23 Y —Terminator ... 3-80 3.6.24 Z — Suppress ... 3-81 3.7 TIMING CONSIDERATIONS ... 3-82 3.7.1 Factors Affecting Sweep Times ... 3-83 3.7.2 Optimizing Source and Measurement Speed ... 3-83 3.7.3 Estimating Sweep Performance ... 3-91 3.7.4 Estimating dc Performance ... 3-92 APPENDICES A Device-dependent Command Summary ... A-l B Interface Function Codes ... B-l C ASCII Character Codes and IEEE-488 Multiline Interface Command Messages ... C-l D Controller Programs ... D-l E IEEE-488 Bus Overview ... E-l F 236/237 Performance Verification ... F'l

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